Half-angle nozzle

ABSTRACT

Embodiments of the present disclosure provide apparatuses for improving gas distribution during thermal processing. In one or more embodiments, an apparatus includes a body, an angled gas source assembly, and a gas injection channel. The gas injection channel has a first half-angle and a second half-angle. The first half-angle is different from the second half-angle. The use of an improved side gas assembly in a processing chamber to direct gas from the center toward the edge of the substrate advantageously controls growth uniformity throughout the substrate. Surprisingly, directing gas through a gas channel with non-uniform half-angles will significantly increase the reaction at or near the edge of the substrate, thereby leading to an improved overall thickness uniformity of the substrate.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.17/001,276, filed Aug. 24, 2020, which is a continuation of U.S.application Ser. No. 15/877,048, filed Jan. 22, 2018, and issued as U.S.Pat. No. 10,752,991, which claims benefit of U.S. Prov. Appl. No.62/455,282, filed Feb. 6, 2017, which are herein incorporated byreference.

BACKGROUND Field

The present disclosure relates generally to a semiconductor processingtool and, more specifically, to a reactor with improved gas flowdistribution.

Description of the Related Art

Semiconductor substrates are processed for a wide variety ofapplications, including the fabrication of integrated devices andmicrodevices. One method of processing substrates includes growing anoxide layer on an upper surface of the substrate sitting within aprocessing chamber. The oxide layer may be deposited by exposing thesubstrate to oxygen and hydrogen gases while heating the substrate witha radiant heat source. The oxygen radicals strike the surface of thesubstrate to form a layer, for example a silicon dioxide layer, on asilicon substrate.

Current processing chamber used for rapid thermal oxidation have limitedgrowth control, resulting in poor processing uniformity. Conventionally,a rotatable substrate support rotates a substrate while a reactant gasis introduced parallel to a horizontal direction of the substrate sothat a film is deposited on the substrate set on the substrate support.Current gas inlet designs result in gas reaching the substrate anddepositing non-uniformly throughout the substrate. The limited growthcontrol due to the current gas inlet designs results in greater growthat the center of the substrate, and poor growth at the edges of thesubstrate.

Therefore, there is a need for an improved gas flow distribution thatprovides growth control for more uniform growth throughout thesubstrate.

SUMMARY

Implementations of the present disclosure provide apparatus forimproving gas distribution during thermal processing. One implementationof the present disclosure provides an apparatus for thermal processing asubstrate. The apparatus includes a body, an angled projection, and agas injection channel. The gas injection channel has a first half-angleand a second half-angle. The first half-angle is different from thesecond half-angle.

Another implementation of the present disclosure provides an apparatusfor processing a substrate comprising a chamber body defining aprocessing volume and a substrate support disposed in the processingvolume. The substrate support has a substrate supporting surface. Theapparatus also includes a gas source projection coupled to an inlet ofthe chamber body, an exhaust assembly coupled to an outlet of thechamber body, and a side gas assembly coupled to a sidewall of thechamber body. The side gas assembly includes a gas injection channel.The gas injection inlet includes a first half-angle and a secondhalf-angle. The first half-angle is different from the secondhalf-angle.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features of the presentdisclosure can be understood in detail, a more particular description ofthe disclosure, briefly summarized above, may be had by reference toimplementations, some of which are illustrated in the appended drawings.It is to be noted, however, that the appended drawings illustrate onlytypical implementations of this disclosure and are therefore not to beconsidered limiting of its scope, for the disclosure may admit to otherequally effective implementations.

FIG. 1A is a schematic, cross-sectional representation of a thermalprocessing chamber that may be used to practice implementations of thepresent disclosure.

FIG. 1B is a schematic cross-sectional top view of the thermalprocessing chamber according to one implementation of the presentdisclosure.

FIG. 2A is a schematic cross-sectional top view of a gas injectoraccording to one implementation of the present disclosure.

FIGS. 2B and 2C are three-dimensional schematics of the gas injectoraccording to the present disclosure.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. It is contemplated that elements disclosed in oneimplementation may be beneficially utilized on other implementationswithout specific recitation.

DETAILED DESCRIPTION

FIG. 1A is a schematic, cross-sectional representation of a thermalprocessing chamber 100 that may be used to practice implementations ofthe present disclosure. The thermal processing chamber 100 generallyincludes a lamp assembly 110, a chamber assembly 130 defining aprocessing volume 139, and a substrate support 138 disposed in theprocessing volume 139. The processing chamber 100 is capable ofproviding a controlled thermal cycle that heats a substrate 101 forprocesses such as, for example, thermal annealing, thermal cleaning,thermal chemical vapor deposition, thermal oxidation and thermalnitridation, etc.

The lamp assembly 110 may be positioned relatively above the substratesupport 138 to supply heat to the processing volume 139 via a quartzwindow 114. The quartz window 114 is disposed between the substrate 101and the lamp assembly 110. The lamp assembly 110 may additionally oralternatively be disposed relatively below the substrate support 138 insome implementations. It is noted that the term “above” or “below” asused in this disclosure are not referring to absolute directions. Thelamp assembly 110 is configured to house a heating source 108, such as aplurality of tungsten-halogen lamps for providing a tailored infraredheating means to a substrate 101 disposed on the substrate support 138.The plurality of tungsten-halogen lamps may be disposed in a hexagonalarrangement. The heating source 108 may be connected to a controller 107which may control the energy level of the heating source 108 to achievea uniform or tailored heating profile to the substrate 101. In oneexample, the heating source 108 is capable of rapidly heating thesubstrate 101 at a rate of from about 50° C./s to about 280° C./s.

The substrate 101 may be heated to a temperature ranging from about 550degrees Celsius to about less than 700 degrees Celsius. The heatingsource 108 may provide zoned heating (temperature tuning) of thesubstrate 101. Temperature tuning may be performed to change thetemperature of the substrate 101 at certain locations while notaffecting the rest of the substrate temperature. A slit valve 137 may bedisposed on the base ring 140 for a robot to transfer the substrate 101into and out of the processing volume 139. The substrate 101 may beplaced on the substrate support 138, which may be configured to movevertically and to rotate about a central axis 123. A gas inlet 131 maybe disposed over the base ring 140 and connected to a gas source 135 toprovide one or more processing gases to the processing volume 139. A gasoutlet 134, formed on an opposite side of the base ring 140 from the gasinlet 131, is adapted to an exhaust assembly 124 which is in fluidcommunication with a pump system 136. The exhaust assembly 124 definesan exhaust volume 125, which is in fluid communication with theprocessing volume 139 via the gas outlet 134.

In one implementation, one or more side ports 122 may be formed over thebase ring 140 between the gas inlet 131 and the gas outlet 134. The sideport 122, the gas inlet 131, and the gas outlet 134 may be disposed atsubstantially the same level. That is, the side port 122, the gas inlet131, and the gas outlet 134 may be at substantially the same level. Aswill be discussed in more detail below, the side port 122 is connectedto a side gas source configured to improve gas distribution uniformitynear edge areas of the substrate 101.

FIG. 1B is a schematic cross-sectional top view of the thermalprocessing chamber 100 according to one implementation of the presentdisclosure. As shown in FIG. 1B, the gas inlet 131 and gas outlet 134are disposed on opposite sides of the processing volume 139. Both of thegas inlet 131 and the gas outlet 134 may have a linear or azimuthalwidth which approximately equals a diameter of the substrate support138.

In one implementation, the gas source 135 may comprise multiple gassources, for example a first gas source 141, and a second gas source142, each configured to provide a processing gas connected to aninjection cartridge 149. Gas flows through from the first gas source 141and the second gas source 142, through the injection cartridge 149 andthe gas inlet 131 into the processing volume 139. In one implementation,the injection cartridge 149 has an elongated channel 150 formed thereinand two inlets 143, 144 formed on opposite ends of the elongated channel150. A plurality of injecting holes 151 are distributed along theelongated channel 150 and are configured to inject a main gas flow 145towards the processing volume 139. The two-inlet design of the cartridge149 improves gas flow uniformity in the processing volume 139. The maingas flow 145 may include 30 to 50 percent hydrogen gas by volume and 50to 70 percent oxygen gas by volume, and have a flow rate ranging fromabout 20 standard liters per minute (slm) to about 50 slm. The flow rateis based on the substrate 101 having a 300 mm diameter, which leads to aflow rate ranging from about 0.028 slm/cm² to about 0.071 slm/cm².

The main gas flow 145 is directed from the gas inlet 131 towards the gasoutlet 134 and to the pump 136, which is a vacuum source for the chamber100. In one implementation, the exhaust volume 125 of the exhaustassembly 124 is configured to extend the processing volume 139 to reducethe geometry influence of the chamber structure on the main gas flow145. The pump 136 may be also used to control the pressure of theprocessing volume 139. In one exemplary operation, the pressure insidethe processing volume is maintained at about 1 Torr to about 19 Torr,such as between about 5 Torr to about 15 Torr.

In one implementation, a gas injector 147 is coupled to the base ring140 so that a gas is flowed along a side gas flow 148 to the processingvolume 139 via the side port 122. The gas injector 147 is in fluidcommunication with a gas source 152 via a flow adjusting device 146configured to control a flow rate of the side gas flow 148. The gassource 152 may include one or more gas sources 153, 154. In oneexemplary example, the gas source 152 is a remote plasma source (RPS)that produces hydrogen radicals to the side port 122. For a RadOx®process that heats the substrate with lamps and injects hydrogen andoxygen into the processing chamber 100 from the slit valve 137, the gasinjector 147 is configured to inject the hydrogen radicals into theprocessing volume 139. The hydrogen radicals introduced from the gasinjector 147 improve the reaction rate along the edge of the substrate101, leading to an oxide layer having improved thickness uniformity. Theside gas flow 148 may have a flow rate ranging from about 5 slm to about25 slm. For a substrate with a 300 mm diameter, the flow rate rangesfrom about 0.007 slm/cm² to about 0.035 slm/cm². The composition and theflow rate of the side gas flow 148 are important factors in forming anoxide layer having improved thickness uniformity.

In the implementation shown in FIG. 1B, the gas injector 147 is astructure with an funnel-like opening which spreads out towards theprocessing volume 139. That is, the side port 122 has an inner diameterthat increases gradually toward the substrate 101. The gas injector 147is adapted to direct the majority of the side gas flow 148 to the edgeof the substrate 101 in the shape of a hollow fan or hollow flattenedcone. The edge of the substrate 101 may refer to the peripheral regionmeasuring from 0 mm to 15 mm, for example 10 mm, from the edge of thesubstrate 101. Since the funnel-shaped structure of the gas injector 147spreads out the majority of the side gas flow 148 aiming at the edge ofthe substrate 101, the gas exposure of the substrate 101 is increased ator near the edge area. In one implementation, the inner surface 179 ofthe gas injector 147 is configured so that it extends along a direction189 that is substantially tangential to the edge of the substrate 101,or substantially tangential to the edge of the substrate supportingsurface of the substrate support 138.

In addition, since the substrate 101 is rotated along counter clockwisedirection 197, the gas flows over the substrate 101 resulting in greatergrowth at the edge of the substrate 101. Although FIG. 1B shows thesubstrate 101 is rotating along counter clockwise direction, thesubstrate 101 may be rotated along a clockwise direction without losingbenefit from the side gas flow 148. The gas velocity of the side gasflow 148, and the gas flow pattern in the processing volume 139, may beadjusted through one or more of a flow rate of the side gas flow 148, arotation speed of the substrate 101, and the spread angle of the gasinjector 147. Controlling aspects of the side gas flow 148 prevents gasflow non-uniformities that may affect how the side gas flow 148 reactswith the main gas flow 145 and the substrate 101. As a result, thethickness profile at the edges of the substrate is improved.

The gas injector 147 may be made of any suitable material such asquartz, ceramic, aluminum, stainless steel, steel, or the like. Tofurther increase the effect of the side gas flow at the edge of thesubstrate 101, the gas injector 147 may be configured to have one ormore gas channels pointing to the edge of the substrate 101. FIG. 2A isa schematic cross-sectional top view of a gas injector 247 according toone implementation of the present disclosure.

In the implementation of FIG. 2A, the gas injector 247 is an elongatedstructure having a gas channel 249 formed therein. The gas injector 247has a body 230 and a projection 205. The projection 205 may betriangular in shape. The projection 205 may be a gas source assembly. Inone implementation, the projection 205 includes an angled opening 246with a circular inlet 216, as seen in FIG. 2B, an angled side 202, afirst facet 218, and a second facet 204. In one implementation, theangled opening 246 is rectangular. In one implementation, the firstfacet 218 is parallel to the second facet 204. The second facet 204 maybe twice the length of the first facet 218. The second facet may bebetween 0.040 and 0.048 inches.

In one implementation, the body 230 is rectangular with rounded edges.The body 230 has a first side 232 opposite a second side 234. In oneimplementation, the first side 232 and the second side 234 aresubstantially the same length. In one implementation, the first side 232and the second side 234 are parallel. The body has a third side 224, afourth side 222, a fifth side 226, and a sixth side 282, as seen in FIG.2B. The first facet 218 may connect the angled side 202 to the fifthside 226. The second facet may connect the angled opening 246 to thefifth side 226. The projection 205 may connect to the fifth side 226.The angled opening 246 may be perpendicular to the angled side 202.

The gas injector may include an elongated channel with any desired shapein cross-section, such as rectangular, square, round, polygonal,hexagonal, or any other suitable shape. The gas injector 247 is adaptedto direct the majority of the side gas flow 148 to the edge of thesubstrate 101 in the shape of a hollow fan or hollow flattened cone. Thegas channel 249 includes two interior surfaces 279, 280. In oneimplementation, interior surfaces 279, 280 are configured so that eachextends along a direction that is substantially tangential to the edgeof the substrate 101, or substantially tangential to the edge of thesubstrate supporting surface of the substrate support 138. Interiorsurfaces 279, 280 extend from an angled opening 246 to a curved surface282. The curved surface 282 is adjacent to the substrate 101 and on theopposite side of the projection 205.

The gas channel 249 is angled to provide a side gas flow 248 to theprocessing volume 139 (FIG. 1B) via the side port 122 (FIG. 1B). Theside gas flow 248 flows along a flow path that adjusts edge profile ofthe substrate 101 being processed. Advantageously and surprisingly,varying the half-angles of the gas channel 249 such that the gas flowpattern of the side gas flow 248 has a non-uniform lateral spreadproduces a more uniform thickness profile of material deposited on thesubstrate 101. Thus, the gas channel 249 has two different half-angles250 a and 250 b. One half-angle 250 a, 250 b may be between 29.5 degreesto 30.5 degrees while the other half-angle 250 a, 250 b may be between31.8 degrees and 32.8 degrees. The half-angles 250 a and 250 b are theangle measured using the central axis line 210 of the substrate 101 andthe central intersection 220 of the gas channel 249. The central axisline 210 is a line that extends from the center of the substrate 101 tothe opening of the gas channel 249. The central axis line 210 isparallel to the first side 232. In one implementation, the central axisline 210 is a line that extends through a point 212 parallel to thefirst side 232. The point 212 is located on the interior edge of theangled opening 246. The angled opening 246 has a circular inlet 216 (asseen in FIG. 2B). The circular inlet 216 leads to an expanded interiorspace 214. In one implementation, the expanded interior space 214 isrectangular. In one implementation, the point 212 is at the intersectionof the angled opening 246 and the interior space 214. In oneimplementation, the expanded interior space 214 is communication withthe inlet channel 249. The central intersection 220 is the mid-point ofthe opening of the gas channel 249. The central intersection 220 isdefined by a line parallel the fifth side 226 and intersecting the pointat which a first facet 218 connects to the angled side 202.

The gas injector 247 has an angled gas source projection 205 inconnection with the gas source 152. In one implementation the angled gassource projection 205 is triangular in shape. In one implementation theopening of the angled gas source projection 205 is disposed at an angle242 that is between about 137 degrees and 141 degrees. In oneimplementation, the gas channel 249 is configured so that gas or gas ofradicals, after exiting the gas channel 249, is flowing in a directionthat is substantially tangential to the edge of the substrate 101, orsubstantially tangential to the edge of the substrate supporting surfaceof the substrate support 138. It is contemplated that the angle of thegas channel 249 may be adjusted so that the side gas flow 248 is flowingtowards the center of the substrate 101 (or substrate support 138),proximate the periphery of the substrate 101 (or substrate support 138),or spatially distributed on the substrate 101 (or substrate support 138)at any desired location.

Regardless of whether the side gas flow 248 (either gas or gas ofradicals) is flowed in a direction tangential to, or proximate the edgeof the substrate 101 (or the edge of the substrate supporting surface ofthe substrate support 138), the gas or gas of radicals significantlypromote the reaction rate along the edge of the substrate 101. For aRadOx® process that heats the substrate with lamps and injects hydrogenand oxygen into the processing chamber 100 from the slit valve 137, thegas injector 247 is configured to provide a side gas flow 248 atdifferent angles to the substrate 101. Surprisingly, providing side gasat or near the edge of the substrate 101 through a gas channel 249 withnon-uniform half-angles leads to an oxide layer having improvedthickness uniformity along the edge of the substrate 101.

In one exemplary implementation, the gas injector 247 is configured tohave the gas channel 249 pointed to the gas injection side of theprocessing chamber 100, e.g., the slit valve 137. That is, the gaschannel 249 is extended along a direction towards the gas injection sideof the processing chamber. In this way, the majority of the gas flowsalong the side gas flow 248 towards the gas injection side of theprocessing chamber 100 and reacts with the processing gas(es) coming outof the injection cartridge 149 (FIG. 1B) at or near the edge of thesubstrate 101 (or the substrate supporting surface of the substratesupport 138).

FIGS. 2B and 2C are three-dimensional schematics of the gas injector 247according to the present disclosure. The gas injector 247 functions todirect majority of gas or gas of radicals flowing along a side gas flowtowards the gas injection side of the processing chamber 100 (e.g., theslit valve 137) and the gas exhaust side of the processing chamber 100(e.g., pump system 136), respectively. Additionally or alternatively,the gas channel 249 may be configured so that the side gas flow 248flows in a direction that is tangential to, or in a direction proximatethe edge of the substrate 101 (or the edge of the substrate supportingsurface of the substrate support 138).

The gas injector 247 includes sides 226, 232, 234, 282, 224, and 222. Afirst side 232 is opposite a second side 234. In one implementation, thefirst side 232 is parallel to and substantially the same length as thesecond side 234. A first curved surface 236 is disposed between thefirst side 232 and the third side 224. The third side 224 is disposedorthogonally to the first side 232. A second curved surface 240 isdisposed between the second side 234 and the third side 224. A thirdcurved surface 238 is disposed between the first side 232 and a fourthside 222. The fourth side 222 is orthogonal to the first side 232. Afourth curved surface 228 is disposed between the second side 234 andthe fourth side 222. The third side 224 is opposite the fourth side 222.A fifth side 226 is opposite a sixth side 282. In one implementation thesixth side 282 is curved. The radius of curvature of the sixth side 282may be between about 8 to about 9 inches. The third side 224 is on thesame plane as the angled gas source projection 205. The gas channel 249is disposed on the sixth side 282 facing the substrate 101.Advantageously, the first side 232 and the second side 234 aresubstantially perpendicular to the fourth side 222 allowing for a morecohesive seal within the chamber 100. One implementation may optionallyinclude facets 204, 218, as seen in FIG. 2C. In one implementation, theangled gas source projection 205 is connected to the fifth side 226 viafacets 204, 218. In one implementation, the angled side 202 and theangled opening 246 are directly connected to the fifth side 226. Thecurvature of the sixth side advantageously promotes a more uniformdiscernment of gas and less turbulent gas flow towards the substrate 101by following the curvature of the substrate 101.

Even though a thermal processing chamber is discussed in thisapplication, implementations of the present disclosure may be used inany processing chamber where uniform gas flow is desired.

Benefits of the present disclosure include the use of an improved sidegas assembly in a processing chamber to direct gas towards the edge ofthe substrate to control growth uniformity throughout the substrate,i.e., from the center to the edge. The side gas assembly has an angledgas inlet configured to point to the gas injection side (e.g., slitvalve) of the processing chamber and/or the gas exhaust side (e.g., pumpsystem) of the processing chamber. Particularly, it has beensurprisingly observed that directing gas through a gas channel withnon-uniform half angles will significantly increase the reaction at ornear the edge of the substrate in a RadOx® process, thereby leading toan improved thickness uniformity along the edge of the substrate as wellas an improved overall thickness uniformity of the substrate.

While the foregoing is directed to implementations of the presentdisclosure, other and further implementations of the disclosure may bedevised without departing from the basic scope thereof, and the scopethereof is determined by the claims that follow.

What is claimed is:
 1. A gas injector adapted to be used with aprocessing chamber for thermally processing a substrate, comprising: abody having a channel configured to conduct a gas to the processingchamber, wherein a central axis extends through and substantiallybisects the channel of the body; and a projection extending from thebody, wherein the projection is triangular and has a channel configuredto conduct the gas to the channel of the body; wherein the channel ofthe projection includes sidewalls arranged at an angle relative to thecentral axis; and wherein the channel of the projection furthercomprises: a first interior surface; a second interior surface oppositethe first interior surface; a first half-angle measured between thefirst interior surface and the central axis; and a second half-anglemeasured between the second interior surface and the central axis,wherein the first half-angle is different from the second half-angle. 2.The gas injector of claim 1, wherein the body further comprises: a firstside; a second side opposite the first side, wherein the first side issubstantially the same length as the second side; a third sideorthogonal to the first side; a first curved surface extending betweenthe first side and the third side; a second curved surface extendingbetween the third side and the second side; a fourth side orthogonal tothe second side; a third curved surface extending between the first sideand the fourth side; a fourth curved surface extending between thefourth side and the second side, wherein the third side is opposite thefourth side; a fifth side orthogonal to the first side; and a sixth sideorthogonal to the first side, wherein the sixth side is opposite thefifth side.
 3. The gas injector of claim 2, wherein the projection isdisposed on the fifth side, and wherein the channel of the body isdisposed on the sixth side.
 4. The gas injector of claim 2, wherein theprojection further comprises: a first facet connected to the fifth side;and a second facet connected to the fifth side and parallel to the firstfacet.
 5. The gas injector of claim 4, wherein the projection furthercomprises a circular inlet.
 6. The gas injector of claim 5, wherein thecircular inlet is in fluid communication with the channel of theprojection.
 7. The gas injector of claim 1, wherein the channel of theprojection provides a gas flow along a flow path in a direction that issubstantially tangential to an edge of a substrate supporting surfaceextending parallel to the flow path.
 8. The gas injector of claim 1,wherein the first half-angle is between about 29.5 degrees and about30.5 degrees, and wherein the second half-angle is between about 31.8degrees and about 32.8 degrees.
 9. The gas injector of claim 1, whereinthe channel of the projection is a flattened funnel-shaped structurethat spreads out towards a processing volume within the processingchamber.
 10. An gas injector for thermal processing a substrate,comprising: a body; a projection connected to the body, wherein theprojection is triangular; and a gas injection channel formed in thebody, the gas injection channel comprising: a first interior surface; asecond interior surface opposite the first interior surface; a firsthalf-angle measured between the first interior surface and a centralaxis of the gas injection channel; and a second half-angle measuredbetween the second interior surface and the central axis, wherein thefirst half-angle is different from the second half-angle.
 11. The gasinjector of claim 10, wherein the body comprises: a first side; a secondside opposite the first side, wherein the first side is substantiallythe same length as the second side; a third side orthogonal to the firstside; a first curved surface extending between the first side and thethird side; a second curved surface extending between the third side andthe second side; a fourth side orthogonal to the second side; a thirdcurved surface extending between the first side and the fourth side; afourth curved surface extending between the fourth side and the secondside, wherein the third side is opposite the fourth side; a fifth sideorthogonal to the first side; and a sixth side orthogonal to the firstside, wherein the sixth side is opposite the fifth side.
 12. The gasinjector of claim 11, wherein the projection is disposed on the fifthside, and wherein the gas injection channel is disposed on the sixthside.
 13. The gas injector of claim 11, wherein the projection furthercomprises: a first facet connected to the fifth side; and a second facetconnected to the fifth side and parallel to the first facet.
 14. The gasinjector of claim 13, wherein the projection further comprises acircular inlet.
 15. The gas injector of claim 14, wherein the circularinlet is in fluid communication with the gas injection channel.
 16. Thegas injector of claim 10, wherein the gas injection channel provides agas flow along a flow path in a direction that is substantiallytangential to an edge of a substrate supporting surface extendingparallel to the flow path.
 17. The gas injector of claim 10, wherein thefirst half-angle is between about 29.5 degrees and about 30.5 degrees,and wherein the second half-angle is between about 31.8 degrees andabout 32.8 degrees.
 18. The gas injector of claim 10, wherein the gasinjection channel is a flattened funnel-shaped structure that spreadsout towards a processing volume within a processing chamber.
 19. A gasinjector adapted to be used with a processing chamber for thermallyprocessing a substrate, comprising: a body having a channel configuredto conduct a gas to the processing chamber, wherein a central axisextends through and substantially bisects the channel of the body, andwherein the body further comprises: a first side; a second side oppositethe first side, wherein the first side is substantially the same lengthas the second side; a third side orthogonal to the first side; a firstcurved surface extending between the first side and the third side; asecond curved surface extending between the third side and the secondside; a fourth side orthogonal to the second side; a third curvedsurface extending between the first side and the fourth side; a fourthcurved surface extending between the fourth side and the second side,wherein the third side is opposite the fourth side; a fifth sideorthogonal to the first side; and a sixth side orthogonal to the firstside, wherein the sixth side is opposite the fifth side; and aprojection extending from the body, the projection having a channelconfigured to conduct the gas to the channel of the body; wherein thechannel of the projection includes sidewalls arranged at an anglerelative to the central axis; and wherein the channel of the projectionfurther comprises: a first interior surface; a second interior surfaceopposite the first interior surface; a first half-angle measured betweenthe first interior surface and the central axis; and a second half-anglemeasured between the second interior surface and the central axis,wherein the first half-angle is different from the second half-angle.20. The gas injector of claim 19, wherein the projection is disposed onthe fifth side, and wherein the channel of the body is disposed on thesixth side.